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Tamarack Stepper Tool

Tamarack Stepper (photolithography — patterning of ITO / Aluminium grid)

  • Cassette to cassette transfer
  • 1X Magnification with ±100ppm correction range
  • 6” reticles with a 12 reticle library
  • i‑line exposure (365nm)a
  • Field Size up to 100mm square
  • Auto-alignment with Vision system
  • Resolution 4µm with Depth of Focus ±10µm
  • Some 2µm capability has been demonstrated with reduced DOF & field size (to be quantified)
  • Overlay ± 1µm
  • Stitching ± 1µm