Solar Semi Coating Bake Development Tool

The Coat Bake Development tool handles 8 inch, 12 inch and GEN2 size substrates. It is fully automated and capable of spinning photo resists and other coatings with good uniformity.

  • Cassette to cassette transfer
  • 3x Spin coat modules, closed lid. Pump or syringe dispense
  • 2x Develop modules
  • EBR for square substrates
  • 2x Hotplates, up to 200ºC, contact or proximity bake
  • 2x Coolpates
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