Roll to Roll Digital Lithography Line
A high speed roll to roll digital lithography tool for the manufacture of flexible organic thin film transistors (OTFT) used in next generation applications such as foldable display screens, sensors, integrated circuits and photo-detectors.
The machine has the ability to continuously manufacture OTFTs directly onto rolls of plastic film at rates approaching 0.1 m2/min. The key feature is ability to expose rolls of film with digital images generated in real time, thereby allowing it to dynamically compensate for any distortions present in each layer of the transistor as it is built up. The line does this by using a state-of-the-art optical exposure engine along with a laser and digital mirror device capable of through-putting up to 150 megabytes per second of image data. The system is capable of four micron line and space resolution in the printed pattern using a print density equivalent to twenty five thousand dots per inch. It uses an exposure wavelength of 355 nanometres and is compatible with a wide range of standard i-line photoresist materials as well as being suitable for other UV-curing processes.