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Plasma Quest Deposition Tool

The Plasma Quest Desposition Tool is a multi-chamber sputter system which uses a remote plasma generation technique in combination with electromagnetic steering of the plasma along the target material.

The plasma is directed to the deposition chamber using a combination of electro-magnets. This permits the tuning of film properties to minimise stress during the deposition. Two pallets scan either side of the plasma and can be loaded with combinations of 4, 6, 8 or 12 inch panels.