Hitachi SU8230 Cold Field Emission Scanning Electron Microscope
The SU8230 is Hitachi’s ultra-high resolution cold-field emission scanning electron microscope. It affords a high current density to allow a greater signal to noise ratio at lower currents while maintaining a stable emission current.
It features a large range of acceleration voltages, 0.1 – 30 kV, making it suitable for a wide range of samples including non-conductive materials. The SU8230 has a multitude of detectors to allow for a combination of topographical and compositional information at a feature resolution of up to 1 nm at optimum conditions.
Attached is a 150 mm2 EDX detector from Oxford Instruments which allows for a greater count rate at lower acceleration voltage and beam current intensities than most EDX detectors. Also available is a Quorum Q150T sample coater capable of sputtering chromium, for high resolution imaging, and evaporating carbon for EDX analysis.