Hitachi Scanning Electron Microscope (SEM)
The SEM utilises an electron beam to create an image by scanning the surface of a substrate under vacuum.
The detected electrons provide information regarding the topography and composition of a material in a greyscale image, and can be used in conjunction with an on-site Ion Beam Mill to provide cross-sectional analysis. The instrument also has an EDX (energy dispersive x-ray spectroscopy) attachment, allowing atomic compositional analysis of samples. Magnification ranges from 12 x to 50,000 x with a resolution of 50nm on substrate sizes up to 4” x 4”