Hitachi Ion Beam Milling System
The Hitachi Ion Beam Milling System is a preparation tool to be used in conjunction with the scanning electron microscope.
The required feature on a glass or polymer substrate is cut to approximately 1 cm x 1 cm, prepared and loaded. An ion beam is concentrated on a chosen area of the sample where material is milled away, leaving a clean edge for cross-sectional analysis to be carried out on the SEM e.g. for measuring layer thicknesses.