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Hitachi Ion Beam Milling System

The Hitachi Ion Beam Milling System is a preparation tool to be used in conjunction with the scanning electron microscope.

The required feature on a glass or polymer substrate is cut to approximately 1 cm x 1 cm, prepared and loaded. An ion beam is concentrated on a chosen area of the sample where material is milled away, leaving a clean edge for cross-sectional analysis to be carried out on the SEM e.g. for measuring layer thicknesses.