Alkali Bench/Wet Etch Tool
The alkali bench is a unit consisting of 1 developer tank filled by bulk chemical fill, 1 DI Water Dump Rinse tank, and 1 tank for manual fill (DIWater / chemical).
The tanks can accommodate 4” up to 12” substrates.
The two processing tanks have the recirculation feature, which gently agitates the chemical. Full PPE is worn when using the bench (chemical resistant apron / chemical resistant gauntlets / face shield) on top of standard cleanroom clothing.