Tamarack Stepper Tool
Tamarack Stepper (photolithography — patterning of ITO / Aluminium grid)
- Cassette to cassette transfer
- 1X Magnification with ±100ppm correction range
- 6” reticles with a 12 reticle library
- i‑line exposure (365nm)a
- Field Size up to 100mm square
- Auto-alignment with Vision system
- Resolution 4µm with Depth of Focus ±10µm
- Some 2µm capability has been demonstrated with reduced DOF & field size (to be quantified)
- Overlay ± 1µm
- Stitching ± 1µm
